JPH0343170U - - Google Patents

Info

Publication number
JPH0343170U
JPH0343170U JP10405889U JP10405889U JPH0343170U JP H0343170 U JPH0343170 U JP H0343170U JP 10405889 U JP10405889 U JP 10405889U JP 10405889 U JP10405889 U JP 10405889U JP H0343170 U JPH0343170 U JP H0343170U
Authority
JP
Japan
Prior art keywords
opening
door
tank
vertical axis
axis direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10405889U
Other languages
English (en)
Japanese (ja)
Other versions
JP2552537Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10405889U priority Critical patent/JP2552537Y2/ja
Publication of JPH0343170U publication Critical patent/JPH0343170U/ja
Application granted granted Critical
Publication of JP2552537Y2 publication Critical patent/JP2552537Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Pressure Vessels And Lids Thereof (AREA)
JP10405889U 1989-09-05 1989-09-05 減圧タンクの扉開閉機構 Expired - Lifetime JP2552537Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10405889U JP2552537Y2 (ja) 1989-09-05 1989-09-05 減圧タンクの扉開閉機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10405889U JP2552537Y2 (ja) 1989-09-05 1989-09-05 減圧タンクの扉開閉機構

Publications (2)

Publication Number Publication Date
JPH0343170U true JPH0343170U (en]) 1991-04-23
JP2552537Y2 JP2552537Y2 (ja) 1997-10-29

Family

ID=31652867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10405889U Expired - Lifetime JP2552537Y2 (ja) 1989-09-05 1989-09-05 減圧タンクの扉開閉機構

Country Status (1)

Country Link
JP (1) JP2552537Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009208658A (ja) * 2008-03-05 2009-09-17 Taiyo Nippon Sanso Corp 真空装置用扉開閉装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5748709B2 (ja) 2012-06-05 2015-07-15 三菱電機株式会社 プローブカード

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009208658A (ja) * 2008-03-05 2009-09-17 Taiyo Nippon Sanso Corp 真空装置用扉開閉装置

Also Published As

Publication number Publication date
JP2552537Y2 (ja) 1997-10-29

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